Browsing by Author "Pawlik, M."
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Publication Sheet resistance corrections for spreading resistance ultra-shallow profiling
Proceedings paper1995, 3rd Int. Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semiconductors, 20/03/1995, p.35.1Publication Towards a physical understanding of spreading resistance probe profiling
Journal article1994, Journal of Vacuum Science and Technology B, (12) 1, p.304-311Publication Two-dimensional spreading resistance profiling: recent understandings and applications
Journal article1994, J. Vac. Sci. Technol. B, (12) 1, p.276-282