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Conference contributions
Sheet resistance corrections for spreading resistance ultra-shallow profiling
Publication:
Sheet resistance corrections for spreading resistance ultra-shallow profiling
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Date
1995
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Pawlik, M.
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Abstract
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1989
since deposited on 2021-09-29
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last month
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last week
Acq. date: 2025-12-13
Citations
Metrics
Views
1989
since deposited on 2021-09-29
1
last month
1
last week
Acq. date: 2025-12-13
Citations