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Browsing by Author "Peaker, Tony"

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    Junction formation in Ge by ion implantation

    Satta, Alessandra
    ;
    Simoen, Eddy  
    ;
    Van Daele, Benny
    ;
    Clarysse, Trudo
    ;
    Nicholas, Gareth
    Proceedings paper
    2007-05, Proceedings International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling - INSIGHT, 6/05/2007, p.297-304

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