Publication:

Junction formation in Ge by ion implantation

Date

2007

Proceedings Paper

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Files

14566.pdf 497.34 KB

Author(s)

Satta, Alessandra

;

;

Van Daele, Benny

;

Clarysse, Trudo

;

Nicholas, Gareth

;

Vandervorst, Wilfried

;

Anwand, Wolfgang

;

Skorupa, Wolfgang

;

;

Marchevic, Vladimir

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Acq. date: 2026-10-13