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Browsing by Author "Pedaballi, Sireesha"

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    Nucleation and growth mechanism for atomic layer deposition of Al2O3 on two-dimensional WS2 monolayer

    Lee, Tsu-Ting
    ;
    Chiranjeevulu, Kashi
    ;
    Pedaballi, Sireesha
    ;
    Cott, Daire  
    ;
    Delabie, Annelies  
    Journal article
    2023, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (41) 1, p.Art.: 013201

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