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Nucleation and growth mechanism for atomic layer deposition of Al2O3 on two-dimensional WS2 monolayer
Publication:
Nucleation and growth mechanism for atomic layer deposition of Al2O3 on two-dimensional WS2 monolayer
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Date
2023
Journal article
https://doi.org/10.1116/6.0001913
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3.75 MB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lee, Tsu-Ting
;
Chiranjeevulu, Kashi
;
Pedaballi, Sireesha
;
Cott, Daire
;
Delabie, Annelies
;
Dee, Chang-Fu
;
Chang, Edward Yi
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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227
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1204
since deposited on 2022-12-17
Acq. date: 2025-12-15
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Metrics
Downloads
227
since deposited on 2022-12-17
62
last month
9
last week
Acq. date: 2025-12-15
Views
1204
since deposited on 2022-12-17
Acq. date: 2025-12-15
Citations