Browsing by Author "Peddeti, Shivaji"
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Publication Chemical mechanical polishing of Ge using colloidal silica particles and H2O2
Journal article2011, Electrochemical and Solid-State Letters, (14) 7, p.254-257Publication Chemical mechanical polishing of InP
Journal article2012, ECS Journal of Solid State Science and Technology, (1) 4, p.P184-P189Publication CMP of Ge and InP for microelectronic applications
Oral presentation2011, 16th International Symposium on Chemical-Mechanical Planarization