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Browsing by Author "Peeters, Kristof"

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    Thickness dependence and annealing behavior of Pt-group metal thin films as alternative metals for advanced interconnects

    Dutta, Shibesh
    ;
    Opsomer, Karl  
    ;
    Hoque, Anamul
    ;
    Peeters, Kristof
    ;
    Richard, Olivier  
    Meeting abstract
    2016, Materials for Advanced Metallization Conference - MAM 2016, 20/03/2016, p.149-150

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