Publication:
Thickness dependence and annealing behavior of Pt-group metal thin films as alternative metals for advanced interconnects
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1837 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-08-31
Citations
Statistics
Views
1837 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-08-31
Citations