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Browsing by Author "Peng, Hsin-Ying"

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    Design-based metrology: beyond CD/EPE metrics to evaluate printability performance

    Halder, Sandip  
    ;
    Mailfert, Julien  
    ;
    Leray, Philippe  
    ;
    Rio, David  
    ;
    Peng, Hsin-Ying
    ;
    Laenens, Bart
    Proceedings paper
    2016, Metrology, Inspection, and Process Control for Microlithography XXX, 20/02/2016, p.97780W

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