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Browsing by Author "Perez-Murano, Francesco"

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    LENS (Lithography Enhancement towards Nano Scale) a european project to support double exposure and double patterning technology development

    Cantu, Pietro
    ;
    Baldi, Livio
    ;
    Piacentini, Paolo
    ;
    Sytsma, Joost
    ;
    Le Gratiet, Bernard
    Proceedings paper
    2010, Optical Microlithography XXIII, 21/02/2010, p.764022

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