Browsing by Author "Petersen, Brennan"
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Publication A Laboratory Light Source for Ultrafast Kinetics of EUV Exposure Processes and Ultra-Small Pitch Lithography
;Cousin, Seth L. ;Bargsten, Clayton ;Rinard, Eric ;Ward, Rod ;Hosler, ErikPetersen, BrennanProceedings paper2020, Conference on Lasers and Electro-Optics (CLEO), MAY 10-15, 2020