Browsing by Author "Peterson, William"
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop
Proceedings paper2002, Proceedings of the IEEE International Interconnect Technology Conference, 3/06/2002, p.51-53