Publication:

Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop

Date

2002

Proceedings Paper

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Author(s)

Kokubo, Terukazu

;

;

Furukawa, Yukiko

;

;

Iacopi, Francesca

;

Struyf, Herbert

;

Van Aelst, Joke

;

Maenhoudt, Mireille

;

;

;

;

Stucchi, Michele

;

Schaekers, Marc

;

Boullart, Werner

;

Van Hove, Marleen

;

Vanhaelemeersch, Serge

;

Peterson, William

;

;

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2065 since deposited on 2021-10-14

Acq. date: 2026-02-25