Publication:
Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop
Date
Loading...
Journal
Abstract
Description
Metrics
Views
2064 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2025-12-08
Citations
Metrics
Views
2064 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2025-12-08
Citations