Browsing by Author "Petersson, C. S."
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Publication Electrical and mechanical characterization of chemical vapor deposition of tungsten on sputter-deposited TiN layers
Journal article1995, J. Appl. Phys., (78) 12, p.7313-22Publication Influence of hydrogen on chemical vapor deposition of tungsten on sputter-deposited TiN layers
Journal article1995, Appl. Phys. Lett., 67, p.2998-3000Publication Strain characterization of CoSi2/n-Si0.9/Ge0.1/p-Si heterostructures