Browsing by Author "Petersson, S."
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Publication Impact of rapid thermal annealing of Ti/TiN bilayers on subsequent chemical vapor deposition of tungsten
Proceedings paper1996, Advanced Metallization for Future ULSI, 8/04/1996, p.365-370Publication Stress Reduction in Tungsten CVD Films by RTA Post-Treatment of Ti/TiN Bilayers in Ammonia
Oral presentation1995, Conference on Advanced Metallization and Interconnect Systems for ULSI Applications; October 3-5, 1995; Portland, Oregon, USA.