Publication:
Stress Reduction in Tungsten CVD Films by RTA Post-Treatment of Ti/TiN Bilayers in Ammonia
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1968 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-10
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Metrics
Views
1968 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-10
Citations