Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Pfitzner, L."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites

    Oechsner, Richard
    ;
    Pfeffer, M.
    ;
    Frickinger, J.
    ;
    Schellenberger, M.
    ;
    Roeder, G.
    ;
    Pfitzner, L.
    Journal article
    2007, IEEE Trans. Semiconductor Manufacturing, (20) 3, p.215-221

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings