Browsing by Author "Pierrat, C."
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Publication Extending ArF to the 65-nm node with full-phase lithography
Proceedings paper2003, Optical Microlithography XVI, 23/02/2003, p.1091-1102Publication Full phase-shifting methodology for 65-nm node lithography
Proceedings paper2003, Optical Microlithography XVI, 23/02/2003, p.282-293