Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Pierrat, C."

Filter results by typing the first few letters
Now showing 1 - 2 of 2
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Extending ArF to the 65-nm node with full-phase lithography

    Driessen, Frank
    ;
    Pierrat, C.
    ;
    Vandenberghe, Geert  
    ;
    Ronse, Kurt  
    ;
    Van Adrichem, Paul  
    ;
    Liu, H.Y.
    Proceedings paper
    2003, Optical Microlithography XVI, 23/02/2003, p.1091-1102
  • Loading...
    Thumbnail Image
    Publication

    Full phase-shifting methodology for 65-nm node lithography

    Pierrat, C.
    ;
    Driessen, Frank
    ;
    Vandenberghe, Geert  
    Proceedings paper
    2003, Optical Microlithography XVI, 23/02/2003, p.282-293

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings