Publication:

Extending ArF to the 65-nm node with full-phase lithography

Date

2003

Proceedings Paper

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Files

7996.pdf 2.07 MB

Author(s)

Driessen, Frank

;

;

Vandenberghe, Geert

;

;

Van Adrichem, Paul

;

Statistics

1960 since deposited on 2021-10-15

Acq. date: 2026-09-14