Browsing by Author "Polovinkin, V. G."

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Calculation of pore size distribution in the ellipsometric porosimetry: method and reliability

Mogilnikov, K. P.
;
Polovinkin, V. G.
;
Dultsev, F. N.
;
Baklanov, Mikhaïl
Proceedings paper
2000, Low-Dielectric Constant Materials V; 5-9 April 1999; San Francisco, Ca, USA., p.81-86
Determination of pore size distribution in thin films by ellipsometric posimetry

Baklanov, Mikhaïl
;
Mogilnikov, K. P.
;
Polovinkin, V. G.
;
Dultsev, F. N.
Journal article
2000, J. Vacuum Science and Technology B, (18) 3, p.1385-1391