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Browsing by Author "Polspoel, W."

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    High-k dielectrics and metal gates for future generation memory devices

    Kittl, Jorge
    ;
    Opsomer, Karl  
    ;
    Popovici, Mihaela Ioana  
    ;
    Menou, Nicolas
    ;
    Kaczer, Ben  
    ;
    Wang, Xin Peng
    Meeting abstract
    2009, 215th ECS Meeting, 24/05/2009, p.690
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    Thumbnail Image
    Publication

    High-k dielectrics and metal gates for future generation memory devices

    Kittl, Jorge
    ;
    Opsomer, Karl  
    ;
    Popovici, Mihaela Ioana  
    ;
    Menou, Nicolas
    ;
    Kaczer, Ben  
    ;
    Wang, Xin Peng
    Proceedings paper
    2009, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-based CMOS. 5: New Materials, Processing, and Equipment, 24/05/2009, p.29-40

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