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Browsing by Author "Ponomarenco, Denis"

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    Calibration of physical resist models: methods, usability, and predictive power

    Klostermann, Ulrich
    ;
    Mülders, Thomas
    ;
    Ponomarenco, Denis
    ;
    Schmoeller, Thomas
    Proceedings paper
    2009, Advances in Resist Materials and Processing Technology XXVI, 22/02/2009, p.727318

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