Browsing by Author "Ponomarenco, Denis"
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Calibration of physical resist models: methods, usability, and predictive power
;Klostermann, Ulrich ;Mülders, Thomas ;Ponomarenco, DenisSchmoeller, ThomasProceedings paper2009, Advances in Resist Materials and Processing Technology XXVI, 22/02/2009, p.727318