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Calibration of physical resist models: methods, usability, and predictive power
Publication:
Calibration of physical resist models: methods, usability, and predictive power
Date
2009
Proceedings Paper
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17918.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Klostermann, Ulrich
;
Mülders, Thomas
;
Ponomarenco, Denis
;
Schmoeller, Thomas
;
Van de Kerkhove, Jeroen
;
De Bisschop, Peter
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1926
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations
Metrics
Views
1926
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations