Publication:

Calibration of physical resist models: methods, usability, and predictive power

Date

2009
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorKlostermann, Ulrich
dc.contributor.authorMülders, Thomas
dc.contributor.authorPonomarenco, Denis
dc.contributor.authorSchmoeller, Thomas
dc.contributor.authorVan de Kerkhove, Jeroen
dc.contributor.authorDe Bisschop, Peter
dc.contributor.imecauthorVan de Kerkhove, Jeroen
dc.contributor.imecauthorDe Bisschop, Peter
dc.date.accessioned2021-10-17T23:31:29Z
dc.date.available2021-10-17T23:31:29Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15609
dc.source.beginpage727318
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXVI
dc.source.conferencedate22/02/2009
dc.source.conferencelocationSan Jose. CA USA
dc.title

Calibration of physical resist models: methods, usability, and predictive power

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
17918.pdf
Size:
656.99 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions