Browsing by Author "Poon, T."
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Publication Basic aspects of the formation and activation of boron junctions using plasma immersion ion implantation
Proceedings paper2008, 17th International Conference in Ion Implantation Technology - IIT, 8/06/2008, p.464-464Publication Conformal doping of FINFET's: a fabrication and metrology challenge
Proceedings paper2008, 17th International Conference in Ion Implantation Technology - IIT, 8/06/2008, p.449-456Publication Probing doping conformality in fin shaped field effect transistor structures using resistors
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.396-401