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Browsing by Author "Poovanna, Bhavishya Chowrira"

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    NA0.33 EUV extension for HVM: Testing single patterning limits

    Leray, Philippe  
    ;
    Dusa, Mircea  
    ;
    Lariviere, Stephane  
    ;
    Roy, Syamashree  
    ;
    Blanco, Victor  
    Proceedings paper
    2025, 2025 Conference on Optical and EUV Nanolithography, FEB 24-27, 2025

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