Publication:

NA0.33 EUV extension for HVM: Testing single patterning limits

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3052244

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Author(s)

Leray, Philippe

;

;

Lariviere, Stephane

;

Roy, Syamashree

;

;

Verstraete, Lander

;

;

Chowrira Poovanna, Bhavishya

;

Kim, Ryan Ryoung Han

;

;

;

Journal

Proceedings of SPIE

Statistics

49 since deposited on 2025-07-31

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Acq. date: 2026-04-25