Browsing by Author "Porter, Stephen"

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Characterization of CF3I for low-k material etching

Samara, Vladimir
;
Porter, Stephen
;
de Marneffe, Jean-Francois
;
Baklanov, Mikhaïl
Meeting abstract
2013, Plasma Etch and Strip in Microtechnology - PESM, 14/03/2013
Effect of 147 nm radiation on a 2.0 porous organo-Silicon glass

de Marneffe, Jean-Francois
;
Lukaszewicz, Mikolaj
;
Porter, Stephen
;
Zhang, Liping
;
Heyne, Markus
Meeting abstract
2013, Materials for Advanced Metallization - MAM, 11/03/2013, p.119-120