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Browsing by Author "Porter, Stephen Barry"

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    Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics

    de Marneffe, Jean-Francois  
    ;
    Zhang, Liping  
    ;
    Heyne, Markus
    ;
    Lukaszewicz, Mikolasj
    Journal article
    2015, Journal of Applied Physics, (118) 13, p.133302

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