Browsing by Author "Postnikov, Sergei"
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Publication Application of immersion lithography inside the MEDEA+ LIQUID project
Oral presentation2005, 2nd International Symposium on Immersion LithographyPublication Model-based design improvements for the 100nm lithography generation
;Lucas, Kevin ;Postnikov, Sergei ;Patterson, Kyle ;Yuan, Min-Chi ;Thomas, CarlaThompson, MattProceedings paper2002, Optical Microlithograhy XV, 5/03/2002, p.215-226