Browsing by Author "Postnikov, Sergey"
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Publication A methodology for double patterning compliant split and design
Proceedings paper2008, SPIE Lithography Asia, 4/11/2008, p.71401XPublication Screening of second-generation high-index liquids
Proceedings paper2007, Advances in Resist Materials and Processing Technology XXIV, 25/02/2007, p.65190APublication Split and design guidelines for double patterning
Proceedings paper2008, Optical Microlithography XXI, 24/02/2008, p.692409