Browsing by Author "Poyai, A."
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Publication Impact of STI width and spacing on the stress generation in deep submicron CMOS
Proceedings paper2004, High Purity Silicon VIII, 3/10/2004, p.307-316Publication Shallow trench isolation dimensions effects on leakage current and doping concentration of advanced p-n junction diodes
Journal article2004, Materials Science and Engineering B, 114-115, p.372-375