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Conference contributions
Impact of STI width and spacing on the stress generation in deep submicron CMOS
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Impact of STI width and spacing on the stress generation in deep submicron CMOS
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Date
2004
Proceedings Paper
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9166.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Poyai, A.
;
Rittaporn, I.
;
Simoen, Eddy
;
Claeys, Cor
;
Rooyackers, Rita
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1779
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations
Metrics
Views
1779
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations