Browsing by Author "Prager, L."

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Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

Prager, L.
;
Marsik, Premysl
;
Wennrich, L.
;
Baklanov, Mikhaïl
;
Naumov, S.
;
Pistol, L.
;
Schneider, D.
Journal article
2008, Microelectronic Engineering, (85) 10, p.2094-2097
Engineering of chemical and physical properties of low-k materials by different wavelength of UV light

Baklanov, Mikhaïl
;
Marsik, Premysl
;
Verdonck, Patrick
;
Ferchichi, Abdelkarim
;
Urbanowicz, Adam
Proceedings paper
2008, ADMETA: Advanced Metallization Conference, 8/10/2008, p.28-29