Browsing by Author "Prokhodtseva, Anna"
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Publication Electron channeling contrast imaging: potential for future metrology in semiconductor industry
Meeting abstract2016, 230 ECS Meeting: Pacific Rim Meeting - PRiME, 2/10/2016, p.1951Publication Seeing the invisible: metrology for extended crystalline defects in beyond silicon semiconductors
Proceedings paper2016, International SiGe Technology and Device Meeting - ISTDM, 7/06/2016Publication Seeing the invisible: metrology for extended defects in beyond-silicon semiconductor device structures
Meeting abstract2017, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, 21/03/2017