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Seeing the invisible: metrology for extended defects in beyond-silicon semiconductor device structures
Publication:
Seeing the invisible: metrology for extended defects in beyond-silicon semiconductor device structures
Date
2017
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schulze, Andreas
;
Prokhodtseva, Anna
;
Vystavel, Tomas
;
Gachet, David
;
Berney, Jean
;
Loo, Roger
;
Vandervorst, Wilfried
;
Caymax, Matty
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Abstract
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1886
since deposited on 2021-10-24
Acq. date: 2025-10-27
Citations
Metrics
Views
1886
since deposited on 2021-10-24
Acq. date: 2025-10-27
Citations