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Seeing the invisible: metrology for extended defects in beyond-silicon semiconductor device structures
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Seeing the invisible: metrology for extended defects in beyond-silicon semiconductor device structures
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Date
2017
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schulze, Andreas
;
Prokhodtseva, Anna
;
Vystavel, Tomas
;
Gachet, David
;
Berney, Jean
;
Loo, Roger
;
Vandervorst, Wilfried
;
Caymax, Matty
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1889
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Acq. date: 2025-12-10
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Views
1889
since deposited on 2021-10-24
1
last month
Acq. date: 2025-12-10
Citations