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Browsing by Author "Prokopowicz, Greg"

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    Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric

    Abell, Thomas
    ;
    Iacopi, Francesca
    ;
    Prokopowicz, Greg
    ;
    Sun, Brad
    ;
    Mazurenko, Alex
    Proceedings paper
    2005-01, Advanced Metallization Conference 2004, 19/10/2004, p.457-462

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