Browsing by Author "Psara, Eleni"

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Edge placement error analysis for N7 logic patterning options

van Setten, Eelco
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Psara, Eleni
;
Wittebrood, Friso
;
Oorschot, Dorothe
;
van Dijk, Joep
Proceedings paper
2015, International Symposium on Extreme Ultraviolet Lithography - EUVL, 5/10/2015
Patterning options for N7 logic : Prospects and challenges for EUV

van Setten, Eelco
;
Wittebrood, Friso
;
Psara, Eleni
;
van Oorschot, Dorothe
;
Philipsen, Vicky
Proceedings paper
2015, 31st European Mask and Lithography Conference, 22/06/2015, p.96610G