Publication:

Patterning options for N7 logic : Prospects and challenges for EUV

Date

2015

Proceedings Paper

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Files

32174.pdf 1.27 MB

Author(s)

van Setten, Eelco

;

Wittebrood, Friso

;

;

van Oorschot, Dorothe

;

Philipsen, Vicky

Statistics

1979 since deposited on 2021-10-23

Acq. date: 2026-02-26