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Browsing by Author "Puppe, Lothar"

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    New slurry formulation for copper-CMP process in a damascene integration scheme

    Terzieva, Valentina  
    ;
    Sijmus, Bram
    ;
    Meuris, Marc  
    ;
    Puppe, Lothar
    ;
    Passing, Gerd
    Proceedings paper
    2002, Chemical-Mechanical Planarization, 1/04/2002, p.I3.4

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