Publication:
New slurry formulation for copper-CMP process in a damascene integration scheme
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1896 since deposited on 2021-10-14
6last month
1last week
Acq. date: 2025-12-15
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Metrics
Views
1896 since deposited on 2021-10-14
6last month
1last week
Acq. date: 2025-12-15
Citations