Publication:
New slurry formulation for copper-CMP process in a damascene integration scheme
Date
| dc.contributor.author | Terzieva, Valentina | |
| dc.contributor.author | Sijmus, Bram | |
| dc.contributor.author | Meuris, Marc | |
| dc.contributor.author | Puppe, Lothar | |
| dc.contributor.author | Passing, Gerd | |
| dc.contributor.imecauthor | Terzieva, Valentina | |
| dc.contributor.imecauthor | Meuris, Marc | |
| dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
| dc.date.accessioned | 2021-10-14T23:20:53Z | |
| dc.date.available | 2021-10-14T23:20:53Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6876 | |
| dc.source.beginpage | I3.4 | |
| dc.source.conference | Chemical-Mechanical Planarization | |
| dc.source.conferencedate | 1/04/2002 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | New slurry formulation for copper-CMP process in a damascene integration scheme | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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