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Browsing by Author "Pustan, Marius"

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    Effects of the electrode positions on the dynamical behaviour of electrostatically actuated MEMS resonators

    Pustan, Marius
    ;
    Paquay, Stephane
    ;
    Rochus, Veronique  
    ;
    Golinval, Jean-Claude
    Proceedings paper
    2011, 12th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE, 17/04/2011

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