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Conference contributions
Effects of the electrode positions on the dynamical behaviour of electrostatically actuated MEMS resonators
Publication:
Effects of the electrode positions on the dynamical behaviour of electrostatically actuated MEMS resonators
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Date
2011
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pustan, Marius
;
Paquay, Stephane
;
Rochus, Veronique
;
Golinval, Jean-Claude
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1824
since deposited on 2021-10-19
Acq. date: 2025-12-13
Citations
Metrics
Views
1824
since deposited on 2021-10-19
Acq. date: 2025-12-13
Citations