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Browsing by Author "Rabinzohn, P."

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    Impact of material/process interactions on the properties of a porous CVD-O3 low-k dielectric film

    Travaly, Youssef
    ;
    Eyckens, Brenda
    ;
    Carbonell, Laure
    ;
    Rothschild, Aude
    ;
    Le, Quoc Toan  
    Journal article
    2002, Microelectronic Engineering, (64) 1_4, p.367-374

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