Browsing by Author "Rack, Simon"
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Publication Laser annealing of double implanted layers for IGBT power devices
;Sabatier, Clement ;Rack, Simon ;Beseaucèle, Herve ;Venturini, JulienHoffmann, Thomas Y.Proceedings paper2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.177-181