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Laser annealing of double implanted layers for IGBT power devices

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2 since deposited on 2021-10-17
Acq. date: 2026-04-07

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1970 since deposited on 2021-10-17
Acq. date: 2026-04-07

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2 since deposited on 2021-10-17
Acq. date: 2026-04-07

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1970 since deposited on 2021-10-17
Acq. date: 2026-04-07

Citations