Browsing by Author "Radovanovic, Sanda"
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Publication Evaluation of post ion-implantation resist strip with the background signal of a light scattering tool
Journal article2010, Japanese Journal of Applied Physics, (49) 5, p.56504Publication Use of surface haze for evaluation of photoresist residue removal efficiency
Journal article2009, IEEE Transactions on Semiconductor Manufacturing, (22) 4, p.587-591Publication Using the background signal of a light scattering tool for I/I photo resist strip optimization and monitoring
Meeting abstract2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS, 19/09/2010, p.174-175