Browsing by Author "Rajagopal, A."

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Copper-SiLK* semiconductor dielectric interface: XPS surface analysis and RF plasma treatment of the resin

Lemaire, J. J.
;
Rajagopal, A.
;
Gregoire, C.
;
Pireaux, J. J.
;
Baklanov, Mikhaïl
Meeting abstract
1999, 196th Meeting of the Electrochemical Society: Interconnects and Contact Metallization for ULSI, 17/10/1999, p.738
Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu

Rajagopal, A.
;
Grégoire, C.
;
Lemaire, J. J.
;
Pireaux, J. J.
;
Baklanov, Mikhaïl
Journal article
1999, Journal of Vacuum Science and Technology B, (17) 5, p.2336-2340